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Example text

The trick is to realize that air bearing lands, or any inactive surfaces that are on the same plane as the bearing face, can be used as a vacuum seal. It is counter-intuitive that an air gap which is being pressurized with air can be a seal for the vacuum, but it actually works very effectively. When you consider that a VPL may consume less than 5 cubic feet of air per hour, and that only half of that will find its way into the vacuum, it is easier to understand. In addition, the small flow into the vacuum can be dramatically reduced when ambient pressure grooves between active air bearing areas are combined with the seal lands.

This technique is used to advantage when high acceleration stages need fast settling times. By guiding X and Y axes off a precision plane the Abby errors and tolerance buildups from stacked linear axis are eliminated thus providing for exceptional flatness of motion. Finally, VPLs allow simultaneous preloading over a plane on both X and Y axes without having the entire guide surface be metal as would be required with magnetic preloading. A common design of vacuum preloaded air bearing has the air bearing land in the center and the vacuum around the perimeter.

For example porous bearings are not sensitive to particulates like bits of Teflon tape, sealant or liners shedding from the inside of fatiguing air tubes. In fact you could porous sand directly into a porous bearing airport with no derogatory effects. This would be catastrophic for an orifice or step compensated bearing. Oil contamination though is more easily cleaned out of an orifice bearing than a porous bearing. Water contamination can usually be corrected by the introduction of clean dry air to the system providing the components are not subject to oxidation.

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